
Adaptive Pressure Controller, PM7, VAT壓力控制器
說明: 650PM-26PM-AAK1/0809 (VAT P/N:102419-R1)
(Software:65PM.3E.21)

715-330984-001 Lam Research Bottom Gas Ring
說明: 715-330984-001 Ring Bottom Gas Injection ESC Lam Research

說明: 650PM-26PM-AAK1/0809 (VAT P/N:102419-R1)
(Software:65PM.3E.21)
說明: 715-330984-001 Ring Bottom Gas Injection ESC Lam Research